Physics: Plasma: Books: Principles of Plasma Discharges and Materials Processing

Submitted: Sat Sep 06 2003
Title:

Physics: Plasma: Books: Principles of Plasma Discharges and Materials Processing

URL: http://diva.EECS.Berkeley.EDU:80/~lieber/Textbook2.html

Description: M. Lieberman and A. Lichtemberg. This book discusses the fundamental principles of partially ionized, chemically reactive plasma discharges and their use in thin-film processing among other applications.

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