Physics: Vacuum: Publications: The Journal of Vacuum Science and Technology B
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Submitted: Sat Sep 06 2003
Title: The Journal of Vacuum Science and Technology B
URL: http://scitation.aip.org/jvstb/
CT: Physics: Vacuum: Publications: The Journal of Vacuum Science and Technology B
Description: Provides a vehicle for the publication of research dealing with microelectronics and nanometer structures.